Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takehiro Hirai0
Kazuo Aoki0
Kenji Obara0
Date of Patent
September 1, 2009
0Patent Application Number
118925830
Date Filed
August 24, 2007
0Patent Primary Examiner
Patent abstract
An automatic defect review and classification system including at least one automatic defect review apparatus for specifically observing defect portions of a sample and at least one automatic defect classification apparatus for automatically classifying the defects, the system further comprising a device which outputs a status for combination of the automatic review apparatus and the automatic defect classification apparatus.
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