Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yohei Tanno0
Yoshihisa Kiyotoki0
Hiromi Shimazu0
Hiroyuki Ohta0
Kenji Araki0
Kenji Onodera0
Date of Patent
September 8, 2009
0Patent Application Number
118347270
Date Filed
August 7, 2007
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A monitoring system for valve device according to the present invention comprises a semiconductor single crystalline substrate including a bridged circuit and the bridged circuit comprising impurity-diffused resistors. The semiconductor single crystalline substrate is mounted to any of a valve device's valve stem, valve yoke, drive shaft, or elastic body disposed at the end of the drive shaft. Thrust and torque of the valve device are measured by the semiconductor single crystalline substrate and then the measured values are used for monitoring the valve device.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
