US Patent 7586103 High refractive index fluids for immersion lithography
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Patent abstract
Provided are compositions suitable for use as immersion liquids in immersion lithography, and immersion lithography processes and apparatus for using the compositions.
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US Patent 07586103 High refractive index fluids for immersion lithography US Patent 7586103 High refractive index fluids for immersion lithography
Infobox
Patent Number
0758610300
Patent Number
758610300
Edits on 30 Mar, 2023
Golden AI
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Is a
Patent Jurisdiction
Patent Number
075861030
Date of Patent
September 8, 2009
0Patent Application Number
117599960
Date Filed
June 8, 2007
0Official Website
Patent Primary Examiner
Edits on 26 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
075861030
Date of Patent
September 8, 2009
0Patent Application Number
117599960
Date Filed
June 8, 2007
0Official Website
Patent Primary Examiner
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US Patent 07586103 High refractive index fluids for immersion lithography
Infobox
Is a
Patent jurisdiction
Patent number
07586103
Date of patent
September 8, 2009
Patent application number
11759996
Date Filed
June 8, 2007
Patent primary examiner
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