US Patent 7586235 Matching circuit for megasonic transducer device
Patent 7586235 was granted and assigned to Applied Materials on September, 2009 by the United States Patent and Trademark Office.
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Patent abstract
A method and apparatus for matching impedance magnitude and impedance phase for an acoustic-wave transducer load and an RF power source. The acoustic-wave transducer load has a load impedance magnitude and phase. The RF power source has a source impedance magnitude and phase. In one embodiment of the invention, a transformer matches the source and load impedance magnitudes. A capacitor, connected in series with the transformer, matches the source impedance phase to the load impedance phase.
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Current Assignee
Patent Jurisdiction
Patent Number
75862350
Date of Patent
September 8, 2009
0Patent Application Number
117038930
Date Filed
February 7, 2007
0Patent Primary Examiner
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US Patent 07586235 Matching circuit for megasonic transducer device US Patent 7586235 Matching circuit for megasonic transducer device
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Patent Number
0758623500
Patent Number
758623500
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Official Website
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
075862350
Date of Patent
September 8, 2009
0Patent Application Number
117038930
Date Filed
February 7, 2007
0Official Website
Patent Primary Examiner
Edits on 22 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
075862350
Date of Patent
September 8, 2009
0Patent Application Number
117038930
Date Filed
February 7, 2007
0Official Website
Patent Primary Examiner
Edits on 18 Jun, 2022
Golden AI
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US Patent 07586235 Matching circuit for megasonic transducer device
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07586235
Date of patent
September 8, 2009
Patent application number
11703893
Date Filed
February 7, 2007
Patent primary examiner
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