Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
September 8, 2009
Patent Application Number
11553886
Date Filed
October 27, 2006
Patent Primary Examiner
Patent abstract
A micro mirror device includes a hinge supported by a substrate and a mirror plate tiltable around the hinge. The hinge is configured to produce an elastic restoring force on the mirror plate when the mirror plate is tilted away from an un-tilted position. The micro mirror device also includes a controller that can produce an electrostatic force to overcome the elastic restoring force to tilt the mirror plate from the un-tilted position to an “on” position or an “off” position. The electrostatic force can counter the elastic restoring force to hold the mirror plate at the “on” position or the “off” position.
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