Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 15, 2009
Patent Application Number
11607632
Date Filed
December 1, 2006
Patent Primary Examiner
Patent abstract
Methods are disclosed for providing reduced particle generating silicon carbide. The silicon carbide articles may be used as component parts in apparatus used to process semiconductor wafers. The reduced particle generation during semiconductor processing reduces contamination on semiconductor wafers thus increasing their yield.
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