US Patent 7589242 Use of highly purified hydrocarbons in vacuum ultraviolet applications
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Patent abstract
The present invention is drawn to the use of alkanes that are highly transparent to UV wavelengths ranging from about 170 nm to 260 nm in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography, particularly at 193 and 248 nm exposure wavelength.
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US Patent 07589242 Use of highly purified hydrocarbons in vacuum ultraviolet applications US Patent 7589242 Use of highly purified hydrocarbons in vacuum ultraviolet applications
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Patent Number
0758924200
Patent Number
758924200
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Patent Jurisdiction
Patent Number
075892420
Date of Patent
September 15, 2009
0Patent Application Number
111412850
Date Filed
September 14, 2005
0Official Website
Patent Primary Examiner
Edits on 28 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
075892420
Date of Patent
September 15, 2009
0Patent Application Number
111412850
Date Filed
September 14, 2005
0Official Website
Patent Primary Examiner
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US Patent 07589242 Use of highly purified hydrocarbons in vacuum ultraviolet applications
Infobox
Is a
Patent jurisdiction
Patent number
07589242
Date of patent
September 15, 2009
Patent application number
11141285
Date Filed
September 14, 2005
Patent primary examiner
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