US Patent 7589921 Actuator device

Actuator devices, as well as related systems and methods, are disclosed. In some embodiments, the devices, systems and methods are within the field of microlithography. In some embodiments, a system can include an optical element unit having an optical element, a support structure supporting the optical element, and an actuator device connected to the optical element and configured to exert an actuation force onto the optical element along a direction of actuation. The actuator device can include an actuation unit which includes a linking section that links first and second sections of the actuation unit.