Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 15, 2009
Patent Application Number
11175360
Date Filed
July 7, 2005
Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention is to allow rapid detection of such a defect as buried in a pixel positional deviation, expansion/contraction noise or sensing noise on an image. A relationship between an inspection reference pattern image and a pattern image to be inspected is identified during inspection to construct a mathematical model obtained by absorbing (applying fitting on) a pixel positional deviation, expansion/contraction noise or sensing noise on an image, and a defect is detected by comparing a new inspection reference pattern image (model image) obtained by simulating the mathematical model and a pattern image to be inspected.
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