Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Futoshi Shimai0
Date of Patent
September 22, 2009
Patent Application Number
11504344
Date Filed
August 15, 2006
Patent Primary Examiner
Patent abstract
A nozzle for supplying a treatment liquid which makes it possible to perform uniform cleaning to a surface of a substrate even in a case where the size of a substrate is large. A slit-shaped ejection hole is formed at the lower end of the nozzle for supplying a treatment liquid. In the nozzle, a passage for supplying a treatment liquid which leads to the slit-shaped ejection hole is formed by bonding two nozzle parts to each other. Projections are provided on the abutting surface of at least one of the two nozzle parts so as to divide a treatment liquid flowing downward through the supply passage into left and right.
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