Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Timotheus Franciscus Sengers0
Klaus Simon0
Roelof Aeilko Siebrand Ritsema0
Sjoerd Nicolaas Lambertus Donders0
Aleksey Kolesnychenko0
Alexander Straaijer0
Erik Roelof Loopstra0
Frank Van Schaik0
...
Date of Patent
September 22, 2009
0Patent Application Number
117104080
Date Filed
February 26, 2007
0Patent Primary Examiner
Patent abstract
A lithographic projection apparatus is disclosed in which a space between the projection system and the substrate is filled with a liquid. An edge seal member at least partly surrounds the substrate or other object on a substrate table to prevent liquid loss when edge portions of the substrate or other object are, for example, imaged or illuminated.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
