Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Seiichiro Udagawa0
Date of Patent
September 29, 2009
0Patent Application Number
105001210
Date Filed
December 6, 2002
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The amount of chemical liquids dispensed by a chemical liquid supply apparatus is stabilized and dispensing accuracy is remarkably improved. A pump discharges a liquid accommodated in a liquid tank. A filter is connected to the pump through a pump outlet flow path to which a pump discharge-side valve for opening/closing the flow path is provided. A dispensing nozzle (liquid dispense portion) is connected to the filter through a liquid discharge flow path to which a discharge valve for opening/closing the flow path is provided. A vacuum source communicates with the filter through an exhaust flow path to which a deaeration valve for opening/closing the flow path is provided.
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