US Patent 7595146 Method of creating a graded anti-reflective coating

Patent 7595146 was granted and assigned to Tokyo Electron on September, 2009 by the United States Patent and Trademark Office.

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Patent Inventor Names

Mark H. Somervell0

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Patent abstract

A method of creating a graded anti-reflective coating (ARC) layer on a thin film is described. The method includes forming the thin film on a substrate, forming an ARC layer on the thin film, and applying a solvent to the ARC layer causing it to swell. A photo-resist layer is formed on the swollen ARC layer. A mixing layer is formed by the diffusion of components from the swollen ARC layer to the photo-resist layer and vice versa. The mixing layer has optical qualities that are distinct from those of either of the ARC layer or the photo-resist layer. The mixing layer forms the graded ARC layer.

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Official Website

https://pdfpiw.uspto.gov/.piw?Docid=075951460

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