Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 29, 2009
Patent Application Number
11572246
Date Filed
July 20, 2005
Patent Primary Examiner
Patent abstract
A pressure testing apparatus for chips on a wafer has a pressure chamber, a support plate arranged between the upper and lower parts of the housing, a wafer chuck, a testing device and a positioning device. The wafer chuck, the testing device and the positioning device are supported to the support plate and arranged inside the pressure chamber. The support plate has, inside the pressure chamber, an opening providing a gas connection between the upper and lower parts of the housing.
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