US Patent 7597608 Pad conditioning device with flexible media mount
Patent 7597608 was granted and assigned to Applied Materials on October, 2009 by the United States Patent and Trademark Office.
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Patent Inventor Names
Shou-Sung Chang0
Steven M. Zuniga0
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Patent abstract
A method and apparatus for conditioning is provided. In one embodiment, a conditioning disk includes a plurality of conditioning elements each having an abrasive working surface, and a flexible foundation having the conditioning elements coupled thereto. The flexible foundation has physical properties that retain the working surfaces in a substantially coplanar orientation with respect to the pad surface.
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US Patent 07597608 Pad conditioning device with flexible media mount US Patent 7597608 Pad conditioning device with flexible media mount
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Patent Number
07597608
Patent Number
7597608
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Official Website
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US Patent 07597608 Pad conditioning device with flexible media mount
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Is a
Current assignee
Patent jurisdiction
Patent number
07597608
Date of patent
October 6, 2009
Patent application number
11928677
Date Filed
October 30, 2007
Patent primary examiner
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