US Patent 7598505 Multichannel ion gun
Patent 7598505 was granted and assigned to Axcelis Technologies on October, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 8, 2005
0
Date of Patent
October 6, 2009
0
Patent Application Number
11074434
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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