US Patent 7598588 Semiconductor structure and method of manufacture
Patent 7598588 was granted and assigned to Hvvi Semiconductors Inc on October, 2009 by the United States Patent and Trademark Office.
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In various embodiments, semiconductor structures and methods to manufacture these structures are disclosed. In one embodiment, a semiconductor device includes a plurality of rectilinear structures, wherein the plurality of rectilinear structures comprise silicon dioxide and extend from a surface of a semiconductor material to a distance of at least about three microns or greater below the surface of the semiconductor material and wherein a first rectilinear structure of the plurality of rectilinear structures is perpendicular to, or substantially perpendicular to, a second rectilinear structure of the plurality of rectilinear structures. Other embodiments are described and claimed.
US Patent 07598588 Semiconductor structure and method of manufacture US Patent 7598588 Semiconductor structure and method of manufacture
US Patent 07598588 Semiconductor structure and method of manufacture
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