Patent attributes
In a preferred embodiment, a thermal mass flow meter is provided with: a pipe arrangement that allows a fluid to flow therein, a chip-type heat-generating element that is anchored on the surface on the periphery of the pipe arrangement and used for heating the fluid in the pipe arrangement, and paired chip-type temperature sensors that are anchored at positions on the upstream side and the downstream side of the heat-generating element with the same distance apart therefrom, on the surface of the pipe arrangement, and formed as members separated from the heat-generating element. With respect to the heat-generating element and the paired temperature sensors, convex portions thereof on a side opposite to the side to be anchored onto the pipe arrangement are housed in a concave of a printed-circuit board, and terminals of the heat-generating element and the paired temperature sensors are connected to the wiring layer of the printed-circuit board, and subsequently secured to the printed-circuit board.
