Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 13, 2009
Patent Application Number
11367406
Date Filed
March 6, 2006
Patent Primary Examiner
Patent abstract
A polishing slurry composition including an abrasive, a pH-adjusting agent, a water-soluble thickening agent, and a chelating agent, wherein the chelating agent includes at least one of an acetate chelating agent and a phosphate chelating agent, and a method of using the same.
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