Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Cécile Jenny0
Pierre Caubet0
Laurin Dumas0
Date of Patent
October 13, 2009
0Patent Application Number
118718600
Date Filed
October 12, 2007
0Patent Primary Examiner
Patent abstract
A metal barrier is realized on top of a metal portion of a semiconductor product, by forming a metal layer on the surface of the metal portion, with this metal layer comprising a cobalt-based metal material. Then, after an optional deoxidation step, a silicidation step and a nitridation step of the cobalt-based metal material of the metal layer are performed. The antidiffusion properties of copper atoms (for example) and the antioxidation properties of the metal barrier are improved.
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