Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Stephane Menard0
Jun Lu0
Nicolas Gonon0
Date of Patent
October 13, 2009
0Patent Application Number
116875720
Date Filed
March 16, 2007
0Patent Primary Examiner
Patent abstract
Microelectromechanical (MEMS) structures and switches employing movable actuators wherein particular ones of which move perpendicular to an underlying substrate and particular others move in a direction substantially parallel to the underlying substrate thereby providing more positive actuation.
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