Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Toshifumi Honda0
Yuji Takagi0
Atsushi Miyamoto0
Hirohito Okuda0
Takashi Hiroi0
Date of Patent
October 13, 2009
0Patent Application Number
107620910
Date Filed
January 20, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention provides a method of classifying defects wherein defects are detected in a first inspection machine. The detected defects are then reviewed by a second inspection machine. A sampling rate for review by the second inspection machine is determined by a defect classifier in the first inspection machine.
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