Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Atsushi Sakaida0
Yuji Tuduki0
Toshihisa Taniguchi0
Norio Goko0
Date of Patent
October 20, 2009
0Patent Application Number
114394180
Date Filed
May 23, 2006
0Patent Primary Examiner
Patent abstract
A workpiece holding method and holding system able to shorten the workpiece attachment/detachment time, wherein pressurized air is circulated through a nozzle of an ejector unit of a chuck at all times to make the inside of a suction chamber a negative pressure before chucking a workpiece, completion of chucking is detected based on a pressure value detected by a pressure sensor after chucking the workpiece, and the workpiece is unchucked by having a valve close an exhaust port to raise the pressure inside an exhaust chamber and introducing pressurized air from the ejector unit to the suction chamber.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
