Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Masataka Yamada0
Date of Patent
October 20, 2009
0Patent Application Number
114751260
Date Filed
June 27, 2006
0Patent Primary Examiner
Patent abstract
Included are a passage-forming substrate in which pressure generating chambers communicating respectively with nozzle orifices from which to eject ink droplets are formed; piezoelectric elements which are provided to one surface of the passage-forming substrate, and each of which is configured of a lower electrode, a piezoelectric layer and an upper electrode; and an insulation film which are provided at least areas corresponding to the piezoelectric elements in order that the insulation film can cover the piezoelectric elements, and which is made of an aluminum oxide thin film containing nitrogen.
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