Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hong-sik Park0
Seung-bum Hong0
Ju-hwan Jung0
Hyoung-soo Ko0
Date of Patent
October 20, 2009
0Patent Application Number
114980950
Date Filed
August 3, 2006
0Patent Primary Examiner
Patent abstract
A method of fabricating a resistive probe having a self-aligned metal shield. The method includes sequentially forming a first insulating layer, a metal shield, and a second insulating layer on a resistive tip of a substrate; etching the second insulating layer to expose the metal shield on a resistive region; etching the exposed metal shield; and etching the first insulating layer to expose the resistive region.
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