Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 20, 2009
Patent Application Number
11510620
Date Filed
August 28, 2006
Patent Primary Examiner
Patent abstract
A probe card, an apparatus and a method of inspecting an object. In the example method, a first inspection current may be divided into a plurality of first divided inspection currents. Each of the first divided inspection currents may be supplied to a different one of a plurality of first chips. A second inspection current may be selectively applied to a second chip other than the first plurality of chips. In an example, the second inspection current may be substantially equal to at least one of the plurality of first divided inspection currents. In a further example, the example probe card and/or the apparatus may perform the example method.
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