US Patent 7607471 Temperature control device

In a temperature control device, a plurality of screening cylinders each having a different diameter are concentrically arranged within a liquid tank to concentrically form a plurality of layered channels which are communicated to define a circulation passage through which constant-temperature fluid flows. A heat transfer tube through which liquid chemical flows is disposed in any one of the channels such that heat exchange between the liquid chemical and the constant-temperature fluid is performed via the heat transfer tube for controlling temperatures of the liquid chemical.