US Patent 7607879 Substrate processing apparatus with removable component module
Patent 7607879 was granted and assigned to Brooks Automation on October, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 15, 2005
Date of Patent
October 27, 2009
Patent Application Number
11154787
Patent Inventor Names
Robert T. Caveney
0
Jeff G. Araujo
0
William Fosnight
0
Ulysses Gilchrist
0
Christopher Hofmeister
0
Daniel A. Hall
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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