US Patent 7611124 Vacuum processing apparatus

Patent 7611124 was granted and assigned to Tokyo Electron on November, 2009 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

Tokyo Electron

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

76111240

Patent Inventor Names

Takehiro Shindo0

Date of Patent

November 3, 2009

Patent Application Number

112973790

Date Filed

December 9, 2005

Patent Primary Examiner

‌

John Bastianelli

Patent abstract

A grease supply mechanism is provided inside a vacuum transfer chamber. The grease supply mechanism includes: a grease storage part in a bottomed cylindrical shape storing grease therein; and a movable cover covering an opening of the grease storage part and sliding while being in contact with an inner wall of the grease storage part. When the cover is pressed and moved, the grease is supplied into a grease inlet via a grease supply port.

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