US Patent 7612353 Lithographic apparatus, contaminant trap, and device manufacturing method
Is a
Date Filed
July 6, 2006
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Date of Patent
November 3, 2009
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Patent Application Number
11481252
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Patent Inventor Names
Vadim Yevgenyevich Banine
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Lambertus Adrianus Van Den Wildenberg
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Leonid Aizikovitch Sjmaenok
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Paul Peter Anna Antonius Brom
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Alexander Alexandrovitch Schmidt
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Antonius Johannes Van De Pas
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Arnoud Cornelis Wassink
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Eric Louis Willem Verpalen
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Josephus Jacobus Smits
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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