US Patent 7612491 Lamp for rapid thermal processing chamber
Patent 7612491 was granted and assigned to Applied Materials on November, 2009 by the United States Patent and Trademark Office.
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Patent abstract
A lamp assembly adapted for use in a substrate thermal processing chamber to heat the substrate to temperatures up to at least about 1100° C. is disclosed. In one embodiment, the lamp assembly comprises a bulb enclosing at least one radiation generating filament attached to a pair of leads, a lamp base configured to receive the pair of leads, a sleeve having a wall thickness of at least about 0.013 inches and a potting compound having a thermal conductivity greater than about 100 W/(K-m).
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US Patent 07612491 Lamp for rapid thermal processing chamber US Patent 7612491 Lamp for rapid thermal processing chamber
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Patent Number
0761249100
Patent Number
761249100
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
076124910
Date of Patent
November 3, 2009
0Patent Application Number
116751450
Date Filed
February 15, 2007
0Official Website
Patent Primary Examiner
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
076124910
Date of Patent
November 3, 2009
0Patent Application Number
116751450
Date Filed
February 15, 2007
0Official Website
Patent Primary Examiner
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US Patent 07612491 Lamp for rapid thermal processing chamber
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07612491
Date of patent
November 3, 2009
Patent application number
11675145
Date Filed
February 15, 2007
Patent primary examiner
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