Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Der-Shen Wan0
Date of Patent
November 3, 2009
0Patent Application Number
113009450
Date Filed
December 15, 2005
0Patent Primary Examiner
Patent abstract
Thin-film thickness and refractive index are measured using the Fourier amplitude of a broadband interferometric spectrum. Due to the smooth nature of the Fourier amplitude as a function of wavelength, as compared to the fast varying Fourier phase conventionally used to measure thickness, increased stability and repeatability of measurement are achieved. As a result, measurements of ultra-thin films with thickness below 100 nm are possible with reliable results.
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