Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kie Y. Ahn0
Leonard Forbes0
Date of Patent
November 10, 2009
0Patent Application Number
112975670
Date Filed
December 8, 2005
0Patent Primary Examiner
Patent abstract
Electronic apparatus and methods of forming the electronic apparatus include a lanthanide yttrium aluminum oxide dielectric film on a substrate for use in a variety of electronic systems. The lanthanide yttrium aluminum oxide film may be structured as one or more monolayers. The lanthanide yttrium aluminum oxide film may be formed by atomic layer deposition.
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