US Patent 7616322 Cyclic error compensation in interferometry systems
Patent 7616322 was granted and assigned to Zygo Corporation on November, 2009 by the United States Patent and Trademark Office.
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An interference signal S(t) is provided from interference between two beams directed along different paths. The signal S(t) is indicative of changes in an optical path difference n{tilde over (L)}(t) between the different paths, where n is an average refractive index along the different paths, {tilde over (L)}(t) is a total physical path difference between the different paths, and t is time. An error signal is provided to reduce errors in an estimate of {tilde over (L)}(t). The error signal is derived at least in part based on one or more collective properties of a distribution of multi-dimensional values. At least one of the multi-dimensional values in the distribution is generated from a plurality of samples of the signal S(t) (e.g., samples of the signal captured at different times).
US Patent 07616322 Cyclic error compensation in interferometry systems US Patent 7616322 Cyclic error compensation in interferometry systems
US Patent 07616322 Cyclic error compensation in interferometry systems
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