Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shih-Hsuan Kuo0
Hung-Ming Tai0
Jin-Liang Chen0
Shih-Fang Lee0
Ching-Ming Yeh0
Date of Patent
November 17, 2009
0Patent Application Number
120588910
Date Filed
March 31, 2008
0Patent Primary Examiner
Patent abstract
The invention relates to a tilting adjustable surface profilometer, comprising an apparatus capable of adjusting an image acquiring angle. The apparatus includes two types of frameworks. One is a translation-stage-type tilting adjustable surface profilometer, which is enabled by the translations of two translation stage with the rotation of a rotary rack, a surface profile with an omni-directional angle of a sample can be obtained. The other framework is a surface profilometer with an arc-trajectory tilting apparatus, which is enabled by guiding the surface profilometer to slide along the arc rails with the rotations of the rotary rack, a surface profile with an omni-directional angle of a sample can be obtained.
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