Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Noriyuki Sakuma0
Date of Patent
November 24, 2009
Patent Application Number
12320475
Date Filed
January 27, 2009
Patent Primary Examiner
Patent abstract
There is a need for providing a flow sensor with metal film resistor that improves detection sensitivity using a metal film for a resistance heat detector and a resistance temperature detector. The flow sensor with metal film resistor is structured to form a resistance heat detector, a resistance temperature detector for resistance heat detector for measuring temperature of the resistance heat detector, an upstream resistance temperature detector, a downstream resistance temperature detector, and an air resistance temperature detector on a silicon substrate. Plural floating-island insulators are provided for the resistance heat detector and within wiring thereof.
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