US Patent 7622098 Method for producing nano-particles of metal oxide

Method for producing nano-particles includes vaporizing a precursor material to produce a vapor, directing the vapor into an isolation chamber, combining a quench fluid in a gaseous state with a quench fluid in a liquid state to form a quench fluid stream, contacting the vapor contained in the isolation chamber with the quench fluid stream thereby cooling the vapor to produce the nano-particles in a carrier stream, and removing the nano-particles from the isolation chamber.