US Patent 7622308 Process control using process data and yield data
Patent 7622308 was granted and assigned to MKS Instruments on November, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 7, 2008
0
Date of Patent
November 24, 2009
0
Patent Application Number
12044346
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Patent Inventor Names
Lawrence Hendler
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Svante Bjarne Wold
0
Kuo-Chin Lin
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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