US Patent 7625448 Inlet system for an MOCVD reactor
Patent 7625448 was granted and assigned to AIXTRON AG on December, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 28, 2006
Date of Patent
December 1, 2009
Patent Application Number
10591906
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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