Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Masamitsu Itoh0
Date of Patent
December 8, 2009
Patent Application Number
11504049
Date Filed
August 15, 2006
Patent Primary Examiner
Patent abstract
According to an aspect of the invention, there is provided a mask defect repairing method of repairing a defect caused by a foreign object on a light transmissive photomask, the method including moving the foreign object on a light transmission section of the light transmissive photomask using a manipulator, and placing the foreign object on a shielding section of the light transmissive photo mask.
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