Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Wilfried Schmidt0
Berthold Schum0
Sylke Klein0
Werner Stockum0
Armin Kübelbeck0
Date of Patent
December 8, 2009
0Patent Application Number
104923080
Date Filed
September 13, 2002
0Patent Primary Examiner
Patent abstract
The invention concerns etching and doping substances free of hydrochloric/fluoride acid used for etching inorganic layers as well as for doping subjacent layers. The invention also concerns a method wherein said substances are used.
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