Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Wilhelmus Josephus Box0
Jan Van Elp0
Joost Jeroen Ottens0
Levinus Pieter Bakker0
Frank Jeroen Pieter Schuurmans0
Jan Evert Van Der Werf0
Date of Patent
December 8, 2009
0Patent Application Number
109627440
Date Filed
October 13, 2004
0Patent Primary Examiner
Patent abstract
A device manufacturing method is disclosed. The method includes patterning a beam of radiation, projecting the patterned beam of radiation onto a plurality of outer target portions of a substrate in a sequence in which each subsequent outer target portion is spaced-apart from a preceding outer target portion, and subsequent to projecting the patterned beam of radiation on the plurality of outer target portions, projecting the patterned beam of radiation onto an inner target portion of the substrate.
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