US Patent 7632349 Silicon wafer surface defect evaluation method
Patent 7632349 was granted and assigned to SUMCO on December, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 25, 2006
0
Date of Patent
December 15, 2009
0
Patent Application Number
11467411
0
Patent Inventor Names
Takaaki Shiota
0
Takeshi Hasegawa
0
Wataru Itou
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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