Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Youngjun Hong0
Seongkeun Lee0
Tae-sik Kang0
Date of Patent
December 15, 2009
0Patent Application Number
112976350
Date Filed
December 9, 2005
0Patent Primary Examiner
Patent abstract
Provided is a spin coating apparatus having a ring-shaped or polygonal auxiliary member for use in manufacture of a coated substrate via spin coating, wherein the auxiliary member is positioned adjacent to the side of a substrate for coating, within a range of a spaced distance of 0.03 to 0.8 mm and a range of a height deviation of less than 0.1 mm, upon mounting the substrate.
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