Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tim Poepken0
Raymund Sonnenschein0
Date of Patent
December 15, 2009
0Patent Application Number
105873990
Date Filed
January 6, 2005
0Patent Primary Examiner
Patent abstract
The present invention relates to a process for producing silicon by thermal decomposition of a gaseous mixture comprising monosilane, monochlorosilane and, if desired, further chlorosilanes, e.g. dichlorosilane.
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