US Patent 7633456 Wafer scanning antenna with integrated tunable dielectric phase shifters

A wafer antenna comprises a wafer substrate, a plurality of antenna elements integrated on the wafer substrate for radiating and receiving a radio frequency signal, an electrical connection integrated on the wafer substrate; a feed network integrated on the wafer substrate for distributing the RF signal from the electrical connection to the antenna elements and from the antenna elements to the electrical connection, and a plurality of tunable dielectric phase shifters integrated on the wafer substrate with each of the tunable dielectric phase shifters coupled to a corresponding one of the antenna elements and controlling the phase of the RF signal coupled to the corresponding one of the antenna elements.