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US Patent 7634128 Stereoscopic three-dimensional metrology system and method

Patent 7634128 was granted and assigned to Rudolph Technologies, Inc. on December, 2009 by the United States Patent and Trademark Office.

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Patent
Patent

Patent attributes

Current Assignee
‌
Rudolph Technologies, Inc.
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7634128
Patent Inventor Names
Donald B. Snow0
John T. Strom0
Raymond H. Kraft0
Date of Patent
December 15, 2009
Patent Application Number
11751617
Date Filed
May 21, 2007
Patent Citations Received
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US Patent 11970900 Frameless supplemental window for fenestration
0
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US Patent 11885738 Reflectometer, spectrophotometer, ellipsometer or polarimeter system including sample imaging system that simultaneously meet the scheimpflug condition and overcomes keystone error
0
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US Patent 11927603 Probes that define retroreflectors, probe systems that include the probes, and methods of utilizing the probes
0
Patent Primary Examiner
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John B Strege
Patent abstract

A stereoscopic three-dimensional optical metrology system and method accurately measure the location of physical features on a test article in a manner that is fast and robust to surface contour discontinuities. Disclosed embodiments may image a test article from two or more perspectives through a substantially transparent fiducial plate bearing a fiducial marking; camera viewing angles and apparent relative distances between a feature on a test article and one or more fiducials may enable accurate calculation of feature position.

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