Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
December 22, 2009
Patent Application Number
10560805
Date Filed
June 18, 2004
Patent Citations Received
Patent Primary Examiner
Patent abstract
A plasma generating electrode of the invention present includes at least a pair of electrodes 5, at least one electrode 5a of the pair of electrodes 5 including a plate-like ceramic body 2 as a dielectric and a conductive film 3 disposed inside the ceramic plate 2 and having a plurality of through-holes 4 formed through the conductive film 3 in its thickness direction, the through-holes having a cross-sectional shape including an arc shape along a plane perpendicular to the thickness direction. The plasma generating electrode can generate uniform and stable plasma at low power consumption.
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