Patent attributes
A liquid ejecting head includes nozzle openings through which a liquid is ejected and a channel-containing substrate having pressure-generating chambers each communicating with the corresponding nozzle openings. Piezoelectric elements are disposed on a side of the channel-containing substrate, and each has a piezoelectric active portion. Each piezoelectric element has a lower electrode, a piezoelectric layer and an upper electrode. A protective film composed of an inorganic insulating material covers the piezoelectric elements. The protective film has exposed portions, each exposing a surface of the upper electrode of the corresponding piezoelectric element. The piezoelectric active portions substantially function as operating portions of the piezoelectric elements.
