US Patent 7638383 Faceted catalytic dots for directed nanotube growth

Patent 7638383 was granted and assigned to Intel on December, 2009 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Intel

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7638383

Date of Patent

December 29, 2009

Patent Application Number

11524067

Date Filed

September 19, 2006

Patent Primary Examiner

‌

Zandra Smith

Patent abstract

Faceted catalytic dots are used for directing the growth of carbon nanotubes. In one example, a faceted dot is formed on a substrate for a microelectronic device. A growth promoting dopant is applied to a facet of the dot using an angled implant, and a carbon nanotube is grown on the doped facet of the dot.

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